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Semiconductor OEM Products

The products listed below are specially designed for use in semiconductor fabrication equipment ("tools") manufactured by GaSonics (Novellus), Axcelis, Applied Materials and other OEMs. Although these products can be used for other applications, GAE offers a complete line of standard products that may be more suitable and cost effective for general purposes. Please visit the Products page and scroll through the list of product groups, and feel free to contact GAE for assistance with product selection.

 

 

Microwave Generators

GAE P/N

Description

Replaces

Used On

Magnetron

912419

1.25 kW OEM Mw

Generator

(Front Access)*

C12935

94-1104

L-3510

910443

(C12139)

913682

1.25 kW Mw Generator, PEP

(Front Access)*

C13170

94-2618

PEP

910443

(C12139)

913714

1.25 kW HV Power Supply

(Front Access)*

C12932-2

61-0052

A-3010

n/a

913715

1.8 kW HV Power Supply

(Front Access)*

D13765

61-2332

Iridia

n/a

* Recommended for all new tools and field replacements

Magnetrons

GAE P/N

Power

Used In

Equiv. P/N

Cooling

Freq

911465

1.45 kW

95-3014

60-2011

NL10254-16

Water

2.45 'GHz

911465-1

1.45 kW

95-2665

95-0502

NL10254-6

Water

2.45 'GHz

911550

1.45 kW

A-3000, PRSP

NL10254-4

Water

2.45 'GHz

913171

1.45 kW

A-1000

A95-45-01-E

Water

2.45 'GHz

MB2658A-170FZ

1.5 kW

SXRHC

0190-09769

DX-582A

Water

2.45 'GHz

910443

1.9 kW

C12935

C12139

73797-06

NL10250-9

Water

2.45 'GHz

911513

1.9 kW

Iridia

60-2025

NL10250-17

Water

2.45 'GHz

912322

1.9 kW

Axcelis

319371

NL10250-20

Water

2.45 'GHz

911147

2 kW

PEP+

60-2043

05-162425-00

Water

2.45 'GHz

912781

2 kW

Matrix

0995-99314

NL10250-24

Water

2.45 'GHz

MB2658A-170FZ

2.5 kW

SXRHC

0920-01072

DX-582A

Water

2.45 'GHz

911297

3 kW

SmartPowerTM

C13733

C13824

Water

2.45 'GHz

910904

3.5 kW

D13449

AG9131A

Water

2.45 'GHz

010226

6 kW

Various

YJ1600

E3327

Water

2.45 GHz

Waveguide Components

GAE P/N

Description

Equiv. P/N

Used On

912224

Offset Waveguide with Coupler

n/a

L-3510

912803-2

Precision 3-Stub Tuner, CPR284

n/a

L-3510

PEP, PEP+

910303

Dual Coupler E-Bend, CPR284

94-3114

PEP+

910406

Dummy Load with Coupler, CPR284

60-2032

PEP+

913709-1

Flex Waveguide, Left Side, with Clamp

94-2623

PEP

913709-2

Flex Waveguide, Right Side, with Clamp

16-282340-00

PEP

910917

Dual Directional Coupler, WR340

60-2022

Iridia

914062

Taper Transition, WR340 to WR284

94-3055

Iridia

Spare Parts and Accessories

GAE P/N

Description

Equiv. P/N

Used On

910923

Control PCB Assy,

Top Access

C12132

73797-04

C13170 (PEP)

D13765 (Iridia)

910923-1

Control PCB Assy,

Side/Front Access

C12132-1

73797-23

C12935 (L-3510)

912419 (L-3510)

911214

SCR Power Board Assy

C12294

73797-05

All above

910441

Plate Transformer

C12254

73797-20

912419 (L-3510)

C12935 (L-3510)

C13170 (PEP)

910442

Filament Transformer

C12872

60-1016

All above

910575

Plate Transformer

C13089

73797-22

C12932-2 (A-3010)

913714 (A-3010)

40101

Crystal Detector Diode, Type N Male

35-2491

Various

350101

Flange Clamp, Quick Release

61-176491-00

Various

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